FEATURES
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Quantum Efficiency of CCD chip
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Extremely high UV, DUV and VUV
sensitivity
APPLICATIONS
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Beam Diagnostics of Stepper
Excimer Lasers: F
2
(157 nm), ArF
(193 nm), KrF
(248 nm)
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Development of UV optics
Spectral Response Characteristic of CCD chip*
The C8000 camera series employs an ultra high sensitive
back-thinned CCD sensor made by Hamamatsu. Espe-
cially in the UV, DUV and VUV wavelength ranges, the
C8000 series offers extremely high sensitivity never be-
fore realized by other scientific CCDs.
BT(Back-thinned)-CCD
DATA SHEET
100
200
300
400
500
600
700
800
900 1000 1100 1200
100
80
60
40
20
0
Wavelength (nm)
Quantum Efficiency (%)
Excimer Laser
F
2
ArF
KrF
Wavelength (nm)
157
193
248
Quantum
84
57
69
* Without sapphire window. The spectral response with sapphire
window is decrease by the transmittance.
(This is typical, not guaranteed. )
Efficiency(%)
(This is typical, not guaranteed. )
Without sapphire
window
With sapphire
window
34 **
42 **
55 **
C8000-20
Video Camera
**Calclated value
DIMENSIONAL OUTLINES (UNIT: mm)
Camera controller (approx. 5.0 kg)
SPECIFICATIONS
Imaging device
Back-thinned frame transfer CCD
Effective number of pixels
640 (H)
480 (V)
Cell size
14
m (H)
14
m (V)
Effective area
Full well capacity typ.
65,000 electrons
Readout noise (r.m.s.)
100 to 150 electrons
(Note: The following functions are not effective with RS-644 digital output)
Frame rate
RS-644 digital out and RS-170A out
RS-232C
Data output
8.96 mm(H)
6.72mm (V)
C-mount
Dynamic range*
30 frame/s
430 : 1
Cooling method
Non-cooling
Cooling temperature
Dark current
-
A/D converter
10bit
Exposure time
1/30 s
External control
Lens mount
Functions
2
285
2
23
1
74
2
7
2
200
1
262
1
333
MIN
MAX
-
0
POWER
C8000
CCD CAMERA CONTROLLER
REMOTE
GAIN
OFFSET
CONTRAST ENHANCEMENT
SETUP
OVER
NORM
VIDEO
LEVEL
SET UP
BG
RECUR
,D=8
4-M
3
2
160
0.5
4
1
66
0.5
8
0.5
18
0.5
32
1
40
1
40
1
90
1
75
0.5
37.5
3
6.3
C8000
CCD CAMERA
D=6
1-32UN C-mount
1/4-20UNC,D=8
Camera head (approx. 1.3 kg)
C8000-20
*Calculated from the ratio of the full well capacity and the readout noise.
Ambient storage/operating temperature
Power consumption
Ambient storage/operating humidity
70VA
70% max. (no condensation)
Typ number
Contrast enhancement
-
Homepage Address http://www.hamamatsu.com
5
Product and software package names noted in this documentation are trademarks or registered trademarks of their respective manufacturers.
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Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.
.
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Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions.
Specifications and external appearance are subject to change without notice..
2003 Hamamatsu Photonics K.K.
ISO 9001
Certificate: 09 105 79045
HAMAMATSU PHOTONICS K.K., Systems Division
812 Joko-cho, Hamamatsu City, 431-3196, Japan, Telephone: (81)53-431-0124, Fax: (81)53-435-1574, E-mail:export@sys.hpk.co.jp
U.S.A. and Canada: Hamamatsu Photonic Systems: 360 Foothill Road, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1)908-231-1116, Fax: (1)908-231-0852, E-mail: usa@hamamatsu.com
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658, E-mail: info@hamamatsu.de
,
France: Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10, E-mail: infos@hamamatsu.fr
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire, AL7 1BW, U.K., Telephone: (44) 1707-294888, Fax: (44) 1707-325777, E-mail: info@hamamatsu.co.uk
North Europe: Hamamatsu Photonics Norden AB: Smidesvgen 12, SE-171-41 Solna, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01, E-mail: info@hamamatsu.se
-
Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Mois, 1/E 20020 Arese (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741, E-mail: info@hamamatsu.it
Cat. No. SICS1069E06
JUL/2003 HPK
Created in Japan (PDF)
Real time background subtruction
Recursive filter (2, 4, 8, 16, 32, 64 frame selectable)
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-10 to +50C / 0 to +40C
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PDF 
ZIP