MEMSIC MXR7210GL/ML Rev.B
Page 1 of 9
2003.11.06
Computer Peripherals
Low Cost, Low Noise
10 g Dual
Axis Accelerometer with
Ratiometric Analog Outputs
MXR7210GL/ML
FEATURES
Low cost
Resolution better than 1milli-g at 1Hz
Dual axis accelerometer fabricated on a monolithic
CMOS IC
On chip mixed signal processing
No moving parts; No loose particle issues
>50,000 g shock survival rating
5mm X 5mm X 2mm LCC package
2.7V to 5.25V single supply continuous operation
Compensated for Sensitivity over temperature
Ultra low initial Zero-g Offset
No adjustment needed outside
APPLICATIONS
Information Appliances
Alarms and Motion Detectors
Disk Drives
MXR7210GL/ML FUNCTIONAL BLOCK DIAGRAM
Vehicle Security
GENERAL DESCRIPTION
The MXR7210GL/ML is a low cost, dual axis accelerometer
fabricated on a standard, submicron CMOS process. It is a
complete sensing system with on-chip mixed signal
processing. The MXR7210GL/ML measures acceleration
with a full-scale range of
10 g and a sensitivity of 100mV/g
@5V. It can measure both dynamic acceleration (e.g.
vibration) and static acceleration (e.g. gravity). The
MXR7210GL/ML design is based on heat convection and
requires no solid proof mass. This eliminates stiction and
particle problems associated with competitive devices and
provides shock survival greater than 50,000 g, leading to
significantly lower failure rate and lower loss due to handling
during assembly and at customer field application.
The MXR7210GL/ML provides two ratiometric analog
outputs that are proportional to 50% of the supply at zero g
acceleration.
The typical noise floor is 0.4 mg/ Hz allowing signals
below 1milli-g to be resolved at 1 Hz bandwidth. The
MXR7210GL/ML is packaged in a hermetically sealed LCC
surface mount package (5 mm x 5 mm x 2 mm height) and is
operational over a
0
C to 70C(GL) or
a
-40
C to +85C(ML)
temperature range.
Information furnished by MEMSIC is believed to be accurate and reliable. However,
no responsibility is assumed by MEMSIC for its use, nor for any infringements of
patents or other rights of third parties which may result from its use. No license is
granted by implication or otherwise under any patent or patent rights of MEMSIC.
MEMSIC, Inc.
800 Turnpike St., Suite 202, North Andover, MA 01845
Tel: 978.738.0900
Fax: 978.738.0196
www.memsic.com
MEMSIC MXR7210GL/ML
Rev.B
Page 2 of 9
2003.11.06
Parameter
Conditions
Min
MXR7210GL
Typ.
Max
Min.
MXR7210ML
Typ.
Max.
Units
SENSOR INPUT
Measurement Range
1
Each Axis
10.0
10.0
g
Nonlinearity
Best fit straight line
0.5
0.5
% of FS
Alignment Error
2
1.0
1.0
degrees
Alignment Error
X Sensor to Y Sensor
0.01
0.01
degrees
Cross Axis Sensitivity
3
0.5
0.5
%
SENSITIVITY
Sensitivity Xout, Yout
Sensitivity Xout, Yout
Each Axis
V
DD
=5.0V
V
DD
=3.0V
90
54
100
60
110
66
90
54
100
60
110
66
mV/g
mV/g
Sensitivity
Change over
Temperature
4
Delta from 25
C
10
15
%
ZERO g BIAS LEVEL
0 g Voltage Xout, Yout
0 g Voltage Xout, Yout
0 g Voltage Xout, Yout
0 g Voltage Xout, Yout
Each Axis
V
DD
=5.0V
V
DD
=5.0V
V
DD
=3.0V
V
DD
=3.0V
2.47
-0.3
1.46
-0.4
2.50
0.00
1.50
0.00
2.53
0.3
1.54
0.4
2.47
-0.3
1.46
-0.4
2.50
0.00
1.50
0.00
2.53
0.3
1.54
0.4
V
g
V
g
0 g Offset vs. Temperature
4
Delta from 25
C
1.5
1.5
mg/
C
NOISE PERFORMANCE
Noise Density, rms
@25
C
0.4
1.0
0.4
1.0
mg/
Hz
FREQUENCY RESPONSE
3dB Bandwidth
19
19
Hz
POWER SUPPLY
Operating Voltage Range
2.7
5.25
2.7
5.25
V
Quiescent Supply Current
@5.0V
3.9
4.7
3.9
4.7
mA
Quiescent Supply Current
@3.0V
4.0
4.9
4.0
4.9
mA
AoutX and AoutY OUTPUTS
Output High Voltage
Output Low Voltage
Current
Turn-On Time
@5.0V Supply
Source or sink
@3.0V-5.0VSupply
Level (0g), @5.0V
Supply
Vs-0.4
100
0.4
250
Vs-0.4
100
0.4
250
V
V
uA
mS
TEMPERATURE RANGE
Operating Range
0
+70
-40
+85
C
MXR7210GL/ML SPECIFICATIONS
(Measurements @ 25
C, Acceleration = 0 g unless otherwise noted; V
DD
= 5.0V unless
otherwise specified)
NOTES
1
Guaranteed by measurement of initial offset and sensitivity.
2
Alignment error is specified as the angle between the true and indicated axis of
sensitivity.
3
Cross axis sensitivity is the algebraic sum of the alignment and the inherent
sensitivity errors.
4
Defined as the output change from ambient to maximum temperature or ambient to
minimum temperature.
MEMSIC MXR7210GL/ML
Rev.B
Page 3 of 9
2003.11.06
All parts are shipped in tape and reel packaging.
ABSOLUTE MAXIMUM RATINGS*
Supply Voltage (V
DD
)
.....................-0.5 to +7.0V
Storage Temperature ......................-65
C to +150C
Acceleration ............................................50,000 g
*Stresses above those listed under Absolute Maximum Ratings may cause permanent
damage to the device. This is a stress rating only; the functional operation of the
device at these or any other conditions above those indicated in the operational
sections of this specification is not implied. Exposure to absolute maximum rating
conditions for extended periods may affect device reliability.
Pin Description: LCC-8 Package
Pin Name Description
1
NC
Do Not Connect
2
TP
Connect to ground
3 COM Common
4
NC
Do Not Connect
5
NC
Do Not Connect
6
Yout
Y Channel Output
7
Xout
X Channel Output
8 V
DD
2.7V to 5.25V
Ordering Guide
Model Package
Style
Temperature
Range
Device
Weight
MXR7210GL
LCC - 8
0 to 70
C
<1.0 gram
MXR7210ML
LCC - 8
-40 to +85
C
<1.0 gram
Caution:
ESD (electrostatic discharge) sensitive device.
Note: The MEMSIC logo's arrow indicates the -X sensing
direction of the device. The +Y sensing direction is rotated 90
away from the +X direction following the right-hand rule. Small
circle indicates pin one(1).
THEORY OF OPERATION
The MEMSIC device is a complete dual-axis acceleration
measurement system fabricated on a monolithic CMOS IC
process. The device operation is based on heat transfer by
natural convection and operates like other accelerometers
having a proof mass. The stationary element, or `proof
mass', in the MEMSIC sensor is a gas.
A single heat source, centered in the silicon chip is
suspended across a cavity. Equally spaced
aluminum/polysilicon thermopiles (groups of
thermocouples) are located equidistantly on all four sides of
the heat source (dual axis). Under zero acceleration, a
temperature gradient is symmetrical about the heat source,
so that the temperature is the same at all four thermopiles,
causing them to output the same voltage.
Acceleration in any direction will disturb the temperature
profile, due to free convection heat transfer, causing it to be
asymmetrical. The temperature, and hence voltage output
of the four thermopiles will then be different. The
differential voltage at the thermopile outputs is directly
proportional to the acceleration. There are two identical
acceleration signal paths on the accelerometer, one to
measure acceleration in the x-axis and one to measure
acceleration in the y-axis. Please visit the MEMSIC
website at www.memsic.com for a picture/graphic
description of the free convection heat transfer principle.
MEMSIC MXR7210GL/ML
Rev.B
Page 4 of 9
2003.11.06
While the sensitivity of this axis has been programmed at
the factory to be the same as the sensitivity for the x-axis,
the
accelerometer
can be programmed for non-equal
sensitivities on the x- and y-axes. Contact the factory for
additional information.
MXR7210GL/ML PIN DESCRIPTIONS
V
DD
This is the supply input for the circuits and the
sensor heater in the
accelerometer
. The DC voltage should
be between 2.7 and 5.25 volts. Refer to the section on PCB
layout and fabrication suggestions for guidance on external
parts and connections recommended.
COM This is the ground pin for the
accelerometer
.
TP This pin should be connected to ground.
Xout This pin is the output of the x-axis acceleration
sensor. The user should ensure the load impedance is
sufficiently high as to not source/sink >250
A typical.
While the sensitivity of this axis has been programmed at
the factory to be the same as the sensitivity for the y-axis,
the
accelerometer
can be programmed for non-equal
sensitivities on the x- and y-axes. Contact the factory for
additional information.
Yout
This pin is the output of the y-axis acceleration
sensor. The user should ensure the load impedance is
sufficiently high as to not source/sink >250
A typical.
DISCUSSION OF TILT APPLICATIONS AND
RESOLUTION
Tilt Applications: One of the most popular applications of
the MEMSIC accelerometer product line is in
tilt/inclination measurement. An accelerometer uses the
force of gravity as an input to determine the inclination
angle of an object.
A MEMSIC accelerometer is most sensitive to changes in
position, or tilt, when the accelerometer's sensitive axis is
perpendicular to the force of gravity, or parallel to the
Earth's surface. Similarly, when the accelerometer's axis is
parallel to the force of gravity (perpendicular to the Earth's
surface), it is least sensitive to changes in tilt.
Table 1 and Figure 2 help illustrate the output changes in
the X- and Y-axes as the unit is tilted from +90
to 0.
Notice that when one axis has a small change in output per
degree of tilt (in mg), the second axis has a large change in
output per degree of tilt. The complementary nature of
these two signals permits low cost accurate tilt sensing to
be achieved with the MEMSIC device (reference
application note AN-00MX-007).
M
E
M
S
I
C
Figure 2: Accelerometer Position Relative to Gravity
X-Axis
Y-Axis
X-Axis
Orientation
To Earth's
Surface
(deg.)
X
Output
(g)
Change
per deg.
of tilt
(mg)
Y
Output
(g)
Change
per deg.
of tilt
(mg)
90 -1.000
0.15
0.000
17.45
85 -0.996
1.37
0.087
17.37
80 -0.985
2.88
0.174
17.16
70 -0.940
5.86
0.342
16.35
60 -0.866
8.59
0.500
15.04
45 -0.707
12.23
0.707
12.23
30 -0.500
15.04
0.866
8.59
20 -0.342
16.35
0.940
5.86
10 -0.174
17.16
0.985
2.88
5 -0.087
17.37
0.996
1.37
0 0.000
17.45
1.000
0.15
Table 1: Changes in Tilt for X- and Y-Axes
Resolution: The accelerometer resolution is limited by
noise. The output noise will vary with the measurement
bandwidth. With the reduction of the bandwidth, by
applying an external low pass filter, the output noise drops.
Reduction of bandwidth will improve the signal to noise
ratio and the resolution. The output noise scales directly
with the square root of the measurement bandwidth. The
maximum amplitude of the noise, its peak- to- peak value,
approximately defines the worst case resolution of the
measurement. With a simple RC low pass filter, the rms
noise is calculated as follows:
Noise (mg rms) = Noise(mg/ Hz ) *
)
6
.
1
*
)
(
(
Hz
Bandwidth
The peak-to-peak noise is approximately equal to 6.6 times
the rms value (for an average uncertainty of 0.1%).
MEMSIC MXR7210GL/ML
Rev.B
Page 5 of 9
2003.11.06
A
OUTX
R
C
A
OUTY
R
C
A
OUTX
Filtered
Output
A
OUTY
Filtered
Output
USING THE MXR7210GL/ML WITH OPERATING
VOLTAGES OTHER THAN 5V
The MXR7210GL/ML is tested and specified at V
DD
=5V;
however, it can be powered with V
DD
as low as 2.7V or as
high as 5.25V. Some performance parameters will change
as the supply voltage is varied. The MXR7210GL/ML
output sensitivity will be linearly proportional to supply
voltage. At 3V the output sensitivity is 3.0/5.0* 100mV/g
=60mV/g. The zero g bias output is also ratiometric, so the
zero g is normally equal to V
DD
/2 at all supply voltages.
EXTERNAL FILTERS
AC Coupling: For applications where only dynamic
accelerations (vibration) are to be measured, it is
recommended to ac couple the accelerometer output as
shown in Figure 3. The advantage of ac coupling is that
zero g offset variations from part to part and zero g offset
change over temperature can be eliminated. Figure 3 is a
HFP (high pass filter) with a 3dB breakpoint given by the
equation:
RC
f
2
1
=
. In many applications it may be
desirable to have the HFP 3dB point at a very low
frequency in order to detect very low frequency
accelerations. Sometimes the implementation of this HFP
may result in unreasonably large capacitors, and the
designer may turn to digital implementations of HFPs
where very low frequency 3dB breakpoints can be
achieved.
Figure 3: High Pass Filter
Low Pass Filter: An external low pass filter would be
useful in low frequency applications such as tilt or
inclination. The low pass filter limits the noise floor and
improves the resolution of the accelerometer. The low pass
filter shown in Figure 4 has a 3dB breakpoint given by the
equation:
RC
f
2
1
=
. For the 200 Hz ratiometric output
device filter, C=0.1
F and R=8k, 5%, 1/8W.
A
OUTX
R
C
A
OUTY
R
C
A
OUTX
Filtered
Output
A
OUTY
Filtered
Output
Figure 4: Low Pass Filter
POWER SUPPLY NOISE REJECTION
One capacitor is recommended for best rejection of power
supply noise (reference Figure 5 below). The capacitor
should be located as close as possible to the device supply
pin (V
DD
). The capacitor lead length should be as short as
possible, and surface mount capacitor is preferred. For
typical applications, the capacitor can be ceramic 0.1 F.
Figure 5: Power Supply Noise Rejection
PCB LAYOUT AND FABRICATION SUGGESTIONS
1. Liberal use of ceramic bypass capacitors is
recommended.
2. Robust low inductance ground wiring should be used.
3. Care should be taken to ensure there is "thermal
symmetry" on the PCB immediately surrounding the
MEMSIC device and that there is no significant heat
source nearby.
4. A metal ground plane should be added directly beneath
the MEMSIC device. The size of the plane should be
similar to the MEMSIC device's footprint and be as
thick as possible.
5. Vias can be added symmetrically around the ground
plane. Vias increase thermal isolation of the device
from the rest of the PCB.
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